| model numberSPV-24M | |
| Equipment size2308*1360*2064mm (length*width*height) | |
| microwave power supply Dual microwave power supply 2000W | |
| capacityAbout 24L | |
| Cleaning product range 80-280mm*25-90mm (length*width) | |
| Size range of material box180-290mm*28-93mm*200mm (length*width*height) | |
| vacuum pumpdry pump | |
| Air configuration Standard oxygen and argon two-way process gas (CF4 gas can be customized) | |
| system controlIndustrial control system | |
